LCP等離子機

2025-07-11 18:38:20

型號Model number		AnPT-SCP 300
生產能力Productive capacity	板厚Panel thickness	0.3-4mm
	電極尺寸Electrode size	330*330mm
	蝕刻效率Etching efficiency	＞2500A/min
	抽真空Vacuum extraction	30s
水滴角Water drop Angle		＜30°
蝕刻均勻性Etching uniformity		≥90%（8寸晶圓121點測試8-inch wafer 121-point test）
重復性很好The repeatability uniformity is very good		＜5%
達因值Dyne value		>50dyne/cm
氣體用量Gas consumption		15- 300ml/min
真空能力Vacuum capacity		極限真空<30mT, 漏率<30mT/min; 工藝真空度80-500mT Limit vacuum <30mT, leakage rate <30mT/min; Process vacuum 80-500mT
射頻電源Radio frequency power supply		1000w/13.56MHz
氣體純度Gas purity		99.999%

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